Exact solution of the phase problem in in situ x-ray reflectometry of a growing layered film

Igor Kozhevnikov, Luca Peverini, and Eric Ziegler The recent development of an exact solution of the phase retrieval problem is applied to the case of in situ x-ray reflectometry measurements performed during the growth of a tungsten film. The measurement of the phase variation during deposition provides information about the depth distribution of ... [J. Appl. Phys. 104, 054914 (2008)] published Fri Sep 12, 2008. (Source: Journal of Applied Physics)